ASML has signed a memorandum of understanding with Tata Electronics to supply lithography equipment for India's first commercial chip fabrication facility. The fab is under construction in Dholera, Gujarat.
Tata Electronics partners with ASML for Dholera fab
The 300mm facility targets a full capacity of 50,000 wafers per month. Powerchip Semiconductor Manufacturing Corporation (PSMC) is licensing process technology for 28nm, 40nm, 55nm, 90nm, and 110nm nodes.
Specifications
- Wafer size: 300mm
- Process nodes: 28nm, 40nm, 55nm, 90nm, 110nm
- Full capacity: 50,000 wafers per month

Total investment in the project is 11000000000 USD (about $11,000,000,000). The Indian government covers 50% of eligible costs through the India Semiconductor Mission. Civil construction is approximately 50% complete, and trial production is targeted for later this year.
Randhir Thakur, CEO and MD of Tata Electronics, said that ASML's deep expertise in holistic lithography solutions will ensure the timely ramp of the fab, create a resilient supply chain, drive innovation, and develop local talent.
ASML and Tata Electronics have not disclosed further details about the equipment configuration or timeline beyond trial production.



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