SMIC Purchases 800 AMEC Etching Machines, Founder Urges Domestic Adoption

Semiconductor Manufacturing International Corporation (SMIC) has purchased at least 800 etching machines from AMEC (Advanced Micro-Fabrication Equipment Inc.), according to SMIC founder Zhang Rujing. The announcement was made during a CCTV Finance 'Dialogue' program on May 19, 2025.

AMEC equipment covers 65nm to 3nm nodes

AMEC's etching equipment covers process nodes from 65nm to 3nm. The company's dual-chamber design can etch two wafers simultaneously, saving over 30% in material costs. AMEC's CCP etching technology is now used in 100% of global CCP etching machines, according to the same CCTV program.

Zhang Rujing emphasized the importance of using domestic equipment for progress. He stated that without using domestic products, it is impossible to identify and fix problems. He also noted that SMIC tests new equipment in small batches, starting with 5 wafers and gradually increasing, with both sides sharing responsibility.

AMEC's etching equipment has entered TSMC's 5nm and 3nm supply chain, as reported by CCTV Finance. The adoption of AMEC machines by major foundries highlights the growing role of Chinese semiconductor equipment in advanced manufacturing.